Photolithography Process

E Beam Lithography V/s X-Ray Lithography

E Beam Lithography Electron-beam lithography (often abbreviated as e-beam lithography, EBL) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist. Electron Beam Lithography (EBL) allows users to write patterns with extremely high resolution, smaller than 10nm in size. Important …

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